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Chemraz® G38 by Greene Tweed is perfluoroelastomer with low metal ion content. It is designed for high-density plasma systems which require seal reliability and minimal contamination. It provides unlimited design flexibility and diversity required for dynamic and static dry processing applications. It offers excellent physical properties and excellent chemical compatibility, withstanding a variety of aggressive chemicals.<br>
<ul style="padding-left: 40px;"><li>It is recommended for process applications such as metalization (PVD, sputtering, evaporation), deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD), remote plasma cleans, ion implant, oxidation, dry plasma etch, dry ashing, diffusion and anneal, and rapid thermal processing (RTP).</li>
<li>It is used in slit valves, chamber seals and bonded gate seals.</li>
<li>Chemraz® G38 is suitable for processing by compression molding.</li></ul> Chemraz® E38 by Greene Tweed is perfluoroelastomer with low metal ion content. It is designed for high-density plasma systems and diffusion processes which require seal reliability and minimal contamination. It offers unlimited design flexibility and diversity required for dynamic and static dry processing applications.<br>
<ul style="padding-left: 40px;"><li>It provides excellent physical properties and excellent chemical compatibility, resisting a variety of aggressive chemicals.</li>
<li>Chemraz® E38 is used in slit valves, chamber seals and bonded gate seals.</li>
<li>It is recommended for process applications such as dry plasma etch, dry ashing, remote plasma cleans, deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD), oxidation, anneal, metalization (PVD, sputtering, evaporation), ion implant, and rapid thermal processing (RTP).</li></ul> Chemraz® XPE by Greene Tweed is perfluoroelastomer material. It shows excellent resistance to both O<sub>2</sub> and CF<sub>4</sub> plasmas, resulting in improved product integrity. It allows reduced product weight loss, increased chip yield and maximized production. It exhibits excellent compression set performance and high-temperature capability, enabling future technology and next-generation applications.<br>
<ul style="padding-left: 40px;"><li>In semiconductor and solar industry, it offers an alternative to legacy products that quickly erode in the oxygen environment.</li>
<li>Its seals provide increased MTBR (mean time between repair) to reduce downtime and maintenance costs.</li>
<li>Chemraz® XPE is recommended for chamber and slit valve seals, endpoint windows, gas inlet/outlet seals, gate and isolator valve seals, reactant delivery system seals, and reaction chamber lid seals.</li></ul>
Chemraz®
Plastics and elastomers supplied by Greene Tweed
3 Products match your search
Chemraz® G38
by Greene Tweed
Chemraz® E38
by Greene Tweed
Chemraz® XPE
by Greene Tweed
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