Chemraz® G38 by Greene Tweed is perfluoroelastomer with low metal ion content. It is designed for high-density plasma systems which require seal reliability and minimal contamination. It provides unlimited design flexibility and diversity required for dynamic and static dry processing applications. It offers excellent physical properties and excellent chemical compatibility, withstanding a variety of aggressive chemicals.
- It is recommended for process applications such as metalization (PVD, sputtering, evaporation), deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD), remote plasma cleans, ion implant, oxidation, dry plasma etch, dry ashing, diffusion and anneal, and rapid thermal processing (RTP).
- It is used in slit valves, chamber seals and bonded gate seals.
- Chemraz® G38 is suitable for processing by compression molding.
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Chemraz® G38 properties
Mechanical properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| 100% Modulus | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Compressive Set | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Hardness, Shore A | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Tensile Elongation | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Tensile Strength | 0.0 Visible After Login | Visible After Login | Visible After Login |
Thermal properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| Long-Term Service Temperature | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Maximum Service Temperature, Air | 0.0 Visible After Login | Visible After Login | Visible After Login |