Chemraz® XPE

Chemraz® XPE by Greene Tweed is perfluoroelastomer material. It shows excellent resistance to both O₂ and CF₄ plasmas, resulting in improved product integrity. It allows reduced product weight loss, increased chip yield and maximized production. It exhibits excellent compression set performance and high-temperature capability, enabling future technology and next-generation applications.

• In semiconductor and solar industry, it offers an alternative to legacy products that quickly erode in the oxygen environment.
• Its seals provide increased MTBR (mean time between repair) to reduce downtime and maintenance costs.
• Chemraz® XPE is recommended for chamber and slit valve seals, endpoint windows, gas inlet/outlet seals, gate and isolator valve seals, reactant delivery system seals, and reaction chamber lid seals.