Chemraz® E38 by Greene Tweed is perfluoroelastomer with low metal ion content. It is designed for high-density plasma systems and diffusion processes which require seal reliability and minimal contamination. It offers unlimited design flexibility and diversity required for dynamic and static dry processing applications.
- It provides excellent physical properties and excellent chemical compatibility, resisting a variety of aggressive chemicals.
- Chemraz® E38 is used in slit valves, chamber seals and bonded gate seals.
- It is recommended for process applications such as dry plasma etch, dry ashing, remote plasma cleans, deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD), oxidation, anneal, metalization (PVD, sputtering, evaporation), ion implant, and rapid thermal processing (RTP).
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| Bio Based content | Visible After Login |
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Chemraz® E38 properties
Mechanical properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| 100% Modulus | 0.0 Visible After Login | Visible After Login | Visible After Login |
| 50% Modulus | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Compressive Set | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Hardness, Shore A | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Tensile Elongation | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Tensile Strength | 0.0 Visible After Login | Visible After Login | Visible After Login |
Thermal properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| Long-Term Service Temperature | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Maximum Service Temperature, Air | 0.0 Visible After Login | Visible After Login | Visible After Login |