Technical datasheet
Semitron® MPR1000
Supplied byMitsubishi Chemical Advanced Materials- Last Updated on Jun 28, 2018
Semitron® MPR1000 by Quadrant is a durable and machinable thermoplastic grade developed for semiconductor applications. It exhibits excellent longevity, excellent heat resistance, low ionic metal content and low out-gassing. It possesses low rate of erosion in plasma chambers and excellent chip resistance. Semitron® MPR1000 is recommended for plasma based vacuum chambers such as Etch, CVD & ion implant. It is used in clamp rings, trench rings, screws, pins, shower heads, centering pins, focus rings, insulators, vacuum pads and wafer guides.
Product Type:
| Bio Based content | Visible After Login |
Compliance
No data available
Applications
Recommended markets
Applications
Availability
Product Status:Visible After Login
Semitron® MPR1000 properties
Electrical properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| Dielectric Constant | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Dielectric Strength | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Dissipation Factor | 0.0 Visible After Login | Visible After Login | Visible After Login |
Flammability properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| Flame Rating, UL 94 | 0.0 Visible After Login | Visible After Login | Visible After Login |
Mechanical properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| Compressive Modulus | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Compressive Strength | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Elongation at Break | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Flexural Modulus | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Flexural Strength | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Impact Strength, Notched Izod | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Modulus of Elasticity | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Shear Strength | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Tensile Strength | 0.0 Visible After Login | Visible After Login | Visible After Login |
Physical properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| Specific Gravity | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Water Absorption | 0.0 Visible After Login | Visible After Login | Visible After Login |
Thermal properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| CTE, Linear | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Deflection Temperature at 1.8 MPa (264 psi) | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Glass Transition Temperature (Tg) | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Maximum Service Temperature, Air | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Thermal Conductivity | 0.0 Visible After Login | Visible After Login | Visible After Login |