Technical datasheet
Semitron® CMP XL20
Supplied byMitsubishi Chemical Advanced Materials- Last Updated on Jun 17, 2015
Semitron® CMP XL20 is an opaque, charcoal/black colored polyarylimide [PAI]. Has significantly lower cost per wafer, outperforms PPS up to 20x in most processes. Exhibits high strength & stiffness which promotes fewer edge defects and better uniformity. Used in semiconductor industry.
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