Tecnoflon® PFR 5910M by Syensqo is a highly pure perfluoroelastomer (FFKM). It contains nanoparticles of polytetrafluoroethylene (PTFE) which acts as organic filler. It exhibits very good oxygen and fluorine plasma resistance, very low particle generation and low outgassing.
- It shows excellent mechanical and sealing properties.
- It offers low friction, high abrasion & chemical resistance and low modulus.
- Suitable for dry (plasma etching, PECVD, LPCVD, metal CVD, PVD, ALD, plasma cleans) and wet semiconductor processes (wafer cleaning, polymer removal, wet etching, polishing).
- Tecnoflon® PFR 5910M is designed for semiconductor manufacturing applications like chamber seals, lid seals, window seals, gas inlet seals, fitting seals, slit valve gates, lip seals and wafer handling parts.
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| Bio Based content | Visible After Login |
Compliance
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Tecnoflon® PFR 5910M properties
Mechanical properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| 100% Modulus | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Compression Set | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Elongation at Break | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Hardness, Shore A | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Maximum Torque (MH) | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Minimum Torque (ML) | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Tensile Strength | 0.0 Visible After Login | Visible After Login | Visible After Login |
Other properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| Glass Transition Temperature (Tg), Midpoint | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Glass Transition Temperature (Tg), Onset | 0.0 Visible After Login | Visible After Login | Visible After Login |
Physical properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| Cure Time (t'50) | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Cure Time (t'90) | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Density | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Scorch Time (ts2) | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Viscosity, Mooney | 0.0 Visible After Login | Visible After Login | Visible After Login |
Thermal properties
| Properties | Value & unit | Test condition | Test method |
|---|---|---|---|
| Brittleness Temperature | 0.0 Visible After Login | Visible After Login | Visible After Login |
| Temperature Retraction (TR10) | 0.0 Visible After Login | Visible After Login | Visible After Login |