Fusion® F07

Fusion® F07 by Greene Tweed is fluoroelastomer (FKM) with enhanced plasma performance. It is designed to withstand oxygen- and fluorine-based chemistries common in etch and CVD processes. It lasts longer than standard fluoroelastomer in semiconductor subfab applications, extending the time between planned maintenance activities. It offers improved total cost of ownership for applications that don’t require an FFKM compound.

• It is available in the form of individual O-rings and assemblies.
• It retains its form and function at temperatures up to 180°C and boasts a minimum expected lifetime of 6 months.
• The form fit is replaceable with other industry standard (KF/ISO) seals.
• The blue outer ring allows for easier identification upon installation and replacement.
• Fusion® F07 is suitable for processing by compression molding.
• It is recommended for heated and non-heated lines in vacuum systems, and ISO-KF vacuum fittings (including typical sizes: KF16, KF25, KF40, KF50, ISO63, ISO80, ISO100, ISO160, and ISO200).