Tecnoflon® PFR 6265B by Syensqo is a non-fluorosurfactant perfluoroelastomer (FFKM) specifically developed for direct plasma applications. It has increased fluorine content and enhanced chain rigidity for superior plasma durability, without compromising mechanical properties or sealing performance.
- It offers exceptional longevity and chemical resistance in the most aggressive semiconductor process conditions.
- Tecnoflon® PFR 6265B is engineered to withstand chemical and physical plasma attack.
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