Celazole® U-60 SD

Celazole® U-60 SD by PBI Performance Products is a high purity, ultra-low metal, polybenzimidazole thermoplastic grade. It exhibits high compressive- and tensile strength, dimensional- and thermal stability. It is recommended for semiconductors, dry etch chambers and sputtering systems, chemical vapor- (CVD) and physical vapor deposition (PVD), and other purity sensitive applications. It is suitable for processing by compression molding.

• It is hydrolytically stable after exposure to high pressure steam or water, and is broadly resistant to hydrocarbons, alcohols, weak acids & bases, hydrogen sulfide, chlorinated solvents, oils, heat transfer fluids and many other organic chemicals.
• It provides outstanding glass transition- and heat deflection temperature, low outgassing, superior abrasion-, heat- & wear resistance, and plasma resistance to CF₄, F, O₂ and Ar plasmas.
• It is used to replace quartz oxide etch chamber seals, extending service life of the seal.
• It also replaces alumina lifting pins, reducing wafer contamination, pin breakage and wafer scratching.
• It is an excellent alternative for polyimide pins, bushings, interior chamber screws & components and insulators by extending life cycle, doubling strength, and reducing particle generation.
• Celazole® U-60 SD is used in focus rings, wafer clamps, and sputtering- chamber seals, clamps & components.